Course Description
Development of fundamental theory for nano and micro systems, as well as their components and structures, using advanced multidisciplinary basic and applied developments. Methods to synthesize, design, analyze, and examine high-performance nano and micro systems.
Athena Title
MICRO/NANO SYSTEMS
Prerequisite
MATH 2500 and (PHYS 1212-1212l or PHYS 1252)
Semester Course Offered
Offered every year.
Grading System
A - F (Traditional)
Course Objectives
By the end of this course, students will: (1) Understand the theoretical foundation for the synthesis, modeling, simulation, analysis, and design of nano and micro systems. (2) Know the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development. (3) Be able to use the concepts, techniques, and technologies to solve problems related to NEMS and MEMS, devices and their structures. (4) Be able to design a basic nano or micro model which possesses required specific functionality.
Topical Outline
Nano and Micro Science, Engineering, and Technology • Introduction and overview. • Current development and needs. • Societal challenges and implications. Nano and Micro Systems, Devices, and Structures • MEMS and NEMS definitions. • Classifications and considerations. Fundamentals of Microfabrication and Technologies • Introduction of basic processes. • Microfabrication and micromachining. • MEMS fabrication technologies. Modeling of Nano and Micro Electromechanical Systems and Device • Introduction to modeling, analysis, and simulation. • Classical mechanics and its application. • Simulations of MEMS in the MATLAB environments. • Induction of Micromachines. Designing and Synthesis of NEMS and MEMS